Directed Self-Assembly of Block Co-Polymers for, Gronheid, Nealey,#
Elsevier Science & Technology
Directed Self-assembly of Block Co-polymers for Nano-manufacturingAuthor(s): Roel Gronheid, Paul Nealey\nFormat: Hardback\nPublisher: Elsevier Science & Technology, United Kingdom\nImprint: Woodhead Publishing Ltd\nISBN-13: 9780081002506, 978-0081002506\nSynopsis\nThe directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing temp.
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