New Approaches to Image Processing based Failure Analysis of ... - 9780323241434

New Approaches to Image Processing based Failure Analysis of Nano-Scale ULSI DevicesAuthor(s): Zeev Zalevsky, Pavel Livshits, Eran Gur\nFormat: Paperback\nPublisher: William Andrew Publishing, United States\nImprint: William Andrew Publishing\nISBN-13: 9780323241434, 978-0323241434\nSynopsis\nNew Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods cant keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. This book presents novel \""smart\"" image processing methods, applications, and case studies concerning quality improvement of microscope image.