Handbook of Silicon Based MEMS Materials and Technologies - 9780323299657

Handbook of Silicon Based MEMS Materials and TechnologiesAuthor(s): Markku Tilli, Mervi Paulasto-Krckel, Teruaki Motooka, Veikko Lindroos\nFormat: Hardback\nPublisher: William Andrew Publishing, United States\nImprint: William Andrew Publishing\nISBN-13: 9780323299657, 978-0323299657\nSynopsis\nThe Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermor.