MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical...
CRC Press
Presenting recent experimental data, this book explores the potential of using MEMS and NT in sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. The book encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons\u2019 health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery. > \nThe integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis.
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