Optical Inspection of Microsystems by Wolfgang Osten, Brian J... - 9780367390570

CRC Press

Optical Inspection of MicrosystemsAuthor(s): Wolfgang Osten, Brian J. Thompson, Angela Duparre, Cosme Furlong, Ingrid De Wolf, Anand Asundi, Kalus Korner, Dietmar Vogel, Christophe Gorecki, Alain Bosseboeuf\nFormat: Paperback\nPublisher: Taylor & Francis Ltd, United Kingdom\nImprint: CRC Press\nISBN-13: 9780367390570, 978-0367390570\nSynopsis\nWhere conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.\n\nOptical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance.