MEMS

Name: MEMS
Brand: CRC Press

CRC Press

Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts in the field, this volume explores a wide range of MEMS applications, ranging from inertial sensors, microactuators, and microscale vacuum pumps to microrobtics and micro-droplet generators. The final section of the book looks toward the future of MEMS, including MEMS autonomous control of free-shear flows and fabrication technologies for nanoscale devices. New chapters in this edition explore topics such as nonlinear electrokinetic devices and molecular self-assembly. > As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas .