Principles of Microelectromechanical Systems by Ki Bang Lee - 9780470466346

Principles of Microelectromechanical SystemsAuthor(s): Ki Bang Lee\nFormat: Hardback\nPublisher: John Wiley & Sons Inc, United States\nImprint: Wiley-IEEE Press\nISBN-13: 9780470466346, 978-0470466346\nSynopsis\nThe building blocks of MEMS design through closed-form solutions\n\n Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications.\n\n Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and .