Microsensors, MEMS and Smart Devices Gardner Hardback Wiley–Blackwell

Microsensors, MEMS, and Smart DevicesAuthor(s): Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim\nFormat: Hardback\nPublisher: John Wiley & Sons Inc, United States\nImprint: John Wiley & Sons Inc\nISBN-13: 9780471861096, 978-0471861096\nSynopsis\nMicrosensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called \""system-on-a-chip\"" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polyme.