Handbook of VLSI Microlithography - 9780815512813

Handbook of VLSI MicrolithographyPrinciples, Technology and Applications\nAuthor(s): William B. Glendinning, John N. Helbert\nFormat: Hardback\nPublisher: William Andrew Publishing, United States\nImprint: William Andrew Publishing\nISBN-13: 9780815512813, 978-0815512813\nSynopsis\nThis handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology .