Handbook of Chemical Vapor Deposition - 9780815513001

Handbook of Chemical Vapor DepositionPrinciples, Technology and Applications\nAuthor(s): Hugh O. Pierson\nFormat: Hardback\nPublisher: William Andrew Publishing, United States\nImprint: William Andrew Publishing\nISBN-13: 9780815513001, 978-0815513001\nSynopsis\nHandbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications o.