Handbook of Physical Vapor Deposition (PVD) Processing Mattox Hardback 2e

Handbook of Physical Vapor Deposition (PVD) ProcessingAuthor(s): Donald M. Mattox\nFormat: Hardback\nPublisher: William Andrew Publishing, United States\nImprint: William Andrew Publishing\nISBN-13: 9780815520375, 978-0815520375\nSynopsis\nThis updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual de.