Microsystem Dynamics by Gang S. Chen, Jianfeng Xu, Wei Hua - 9781118848906

Microsystem DynamicsPrinciples and Applications\nAuthor(s): Gang S. Chen, Jianfeng Xu, Wei Hua\nFormat: Hardback\nPublisher: John Wiley & Sons Inc, United States\nImprint: John Wiley & Sons Inc\nISBN-13: 9781118848906, 978-1118848906\nSynopsis\nDiscover a comprehensive look at the principles and applications of microsystem dynamics \n\nMicrosystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Since research and industrial production in recent decades has generated considerable knowledge of microsystem dynamics, there is an urgent need for a single guide which combines microsystem theory with practical applications to provide a general framework. \n\nMicrosystem Dynamics fills this need, with the first single-volume overview of its kind. It presents the fundamental principles of microsystem dynamics in a unified theoretical framew.