Compact Plasma and Focused Ion Beams - 9781138033672

Name: Compact Plasma and Focused Ion Beams - 9781138033672
Brand: CRC Press

CRC Press

This book discusses method to produce compact microwave plasma by overcoming challenges posed by geometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams. > This book discusses method to produce compact microwave plasma by overcoming challenges posed by geometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams. > IntroductionPlasmaParticle InteractionsSome Basic Plasma PropertiesCriterion for the Definition of a PlasmaDifferent Types of PlasmasDescription of PlasmasTheoretical ApproachesMicrowave-Generated PlasmasCompact Microwave Plasma SourcesResearch Objective and MethodsReferencesReview of the n