Science and Technology of Chemical Mechanical Planarization (New)

Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157Author(s): Ashok Kumar, C. Fred Higgs, III, Chad S. Korach, Subramanian Balakumar\nFormat: Hardback\nPublisher: Materials Research Society, United States\nImprint: Materials Research Society\nISBN-13: 9781605111308, 978-1605111308\nSynopsis\nThis book demonstrates the swift progress achieved in the field of diamond for electronic and bioelectronic applications. Predicted to become the 'ultimate semiconductor' in the early 1990s, diamond initially failed to match the impressive developments made with other wide-bandgap semiconductors. The situation is changing, with single-crystal electronic-grade diamond becoming a commercially available material. As importantly, the spectacular properties of single-point defects in diamond, as well as its superlative thermal conductivity, radiation 'hardness' and inherent biocompatibility, are being recognized as vital for devices used in biosensing, quantum informatics, a.