Analysis and Design Principles of MEMS Devices, Bao 9780444516169 New,#

Further Details\n\nTitle: Analysis and Design Principles of MEMS Devices\nCondition: New\nAuthor: Minhang Bao\nFormat: Hardback\nType: Hardback\nEAN: 9780444516169\nISBN: 9780444516169\nPublisher: Elsevier Science Ltd\nGenre: Science Nature & Math\nRelease Date: 12/04/2005\nDescription: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the auth.